Why did splunk fail to install uf on windows2012 r2?

[ssu]

my os is windows2012 R2, I try to install splunk uf 9.0.0.1.
first, I uninstall old splunk UF 7.0.2 from "uninstall program", then clean registry.
then I install new splunk UF 9.0.0.1. but it failed.
the error is 
MSI (s) (2C:28) [05:37:40:433]: Hello, I'm your 64bit Elevated Non-remapped custom action server.
InstallRegmonDrv: Warning: Invalid property ignored: FailCA=.
InstallRegmonDrv: Info: Driver inf file: C:\Program Files\SplunkUniversalForwarder\bin\splunkdrv.inf.
InstallRegmonDrv: Info: Enter. Args: rundll32.exe, setupapi,InstallHinfSection DefaultInstall 128 C:\Program Files\SplunkUniversalForwarder\bin\splunkdrv.inf
InstallRegmonDrv: Info: SystemPath is: C:\Windows\system32\
InstallRegmonDrv: Info: Execute string: C:\Windows\system32\cmd.exe /c "C:\Windows\system32\rundll32.exe setupapi,InstallHinfSection DefaultInstall 128 C:\Program Files\SplunkUniversalForwarder\bin\splunkdrv.inf >> "C:\Users\ssu\AppData\Local\Temp\splunk.log" 2>&1"
InstallRegmonDrv: Error: Failed to create process : 0x2
InstallRegmonDrv: Warning: Failed to install regmon driver.
InstallRegmonDrv: Error 0x80004005: Cannot install regmon driver.
CustomAction InstallRegmonDrv returned actual error code 1603 (note this may not be 100% accurate if translation happened inside sandbox)
MSI (s) (2C:A0) [05:37:40:480]: Note: 1: 2265 2: 3: -2147287035

I try to run "sfc /scannow" and reboot server, it doesn't resolve my issue

I also run "sfc.exe /verifyfile=%windir%\system32\difxapi.dll" and "sfc.exe /scanfile=%windir%\system32\difxapi.dll" . it also doesn't resolve my issue.

ssu_0-1663056010477.png

What's the issue?  could you help to check my issue